Multifunctional Vacuum Coating Instrument(ISUPAM)

   The system has three chambers, a main coating chamber, a pretreatment chamber, a transition chamber, and a combined glove box system. The main coating chamber contains fourteen stations (10 organic evaporation beam source furnaces, 4 inorganic evaporation boats), which can simultaneously deposit different organic materials, can perform on-line temperature control and detection on the substrate, and has 5 multi-directional Quartz film thickness detector can accurately detect the film thickness of the device in situ; the pretreatment chamber is responsible for the surface cleaning of the substrate (plasma bombardment); the transition chamber is responsible for the bridge function in the main vacuum chamber and the glove box system; one can accurately control the position. The transfer rod transfers the device between the three chambers and the glove box under high vacuum conditions to ensure device stability.